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Set-up for in-situ film growth, modification and analysis (SIGMA) (00254)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Daniel Primetzhofer

2nd Responsible:

Group:

Tandem Laboratory

Files

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Description

Composition depth profiling during (reactive) film synthesis and modification

Details

Tool name:

Set-up for in-situ film growth, modification and analysis (SIGMA)

Tool ID:

00254

Manufacturer:

TBD

Model:

TBD

Tool Modes

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