Variable angle spectroscopic ellipsometer manufactured by Woolam co.
Measurement of change in polarization state of light reflected of the surface of (or transmitted through) a sample. The data can be related to the complex refractive index of the material, thickness and other properties (porosity, doping, composition, etc.)
- Components: Vertical ellipsometer system, HS190 monochromator and VB-250 control box.
- Spectral range provided from the monochromator: 250 to 1700 nm.
- Wavelength range: 300 nm to 1700 with the IR fiber. From 250 nm to 1700 except for a window between 1350-1400 nm with UV fiber.
- Angle of incidence with an accuracy of 0.010°