Picture of Sputtering system (Sleipner)
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
Group:
Inorganic Chemistry
You must be logged in to view files.

Magnetron sputtering deposition of thin films with five magnetrons and manipulator for axial alignment , rf/dc bias (80W), max T 1000C, 60 rpm. Designed for combinatorial studies

Tool name:
Sputtering system (Sleipner)
Tool ID:
00105
Manufacturer:
Home made
Model:
N/A

Instructors

Licensed Users

You must be logged in to view tool modes.